ULVAC

The DA Series (Built-in type) / DAL Series feature an integral motor design which is compact and lightweight. An efficient forced air cooling system and thermal protection contribute to the high reliability of DA Series (Built-in type) / DAL Series pumps. Single and double stage versions are available with pumping capacities ranging from 5 L / min. to 360 L / min. Also, consider the Ulvac Heliot Vacuum Leak Detector in your order.

Features:

• Clean Vacuum
• Thermal protector
• Forced air cooling system
• Quiet and smooth rotation

Application:

• Vacuum chuck
• Water transfer
• Film adhesion
• Vacuum tweezers
• Medical equipment
• Printing machines
• Automated machines
• Packing machines
• Optical instrument
• Analyzers such as gas sumplers, etc.

• Clean vacuum
• Quiet and smooth rotation

Application:

• Vacuum chack
• Water transfer
• Film adhesion
• Vacuum tweezers
• Medical equipment
• Printing machines
• Automated machines
• Packing machines
• Optical instrument
• Analyzers such as gas sumplers, etc.

Features:

• DAH Series is diaphragm type pump that an ultimate pressure of DS Series is enhanced. It achieves an excelling 9 Torr as 2-stages diaphragm pump.
• DAU Series is 3-stages high vacuum diaphragm pump, realizing 1.5 Torr

• Anti suck back mechanism
• Forced oiling system
• Gas ballast valve
• Over current protector

Application:

• Scientific experiment
• Analytical instrument
• Vacuum pumping system
• Laser applied equipments
• Electron microscope
• Sputtering
• Vacuum coater
• Vacuum drying
• Freeze drying

Features:

• The DAP series is an upgraded version of the DA series diaphragm dry vacuum pump and can be used for making both pressure and vacuum. In addition to ease of maintenance and clean pumping, which are the characteristics of the diaphragm pump, the DAP series features multifunction and small-size and is best suited for installing equipment.

• MD Series is an epoch-making 3 stages diaphragm pump, realizing 2 Torr by enhancing an ultimate pressure performance of the traditional diaphragm vacuum pump. Anti-corrosive type is also available.

Application:

• Backing pump for a wide range turbo-molecular pump
• Roughing pump for Cryopump exhaust system
• CVD systems
• Vacuum Dry Systems
• Laser-gas circulation & exhaust system

Features:

• DOP Series is a rocking piston type dry pump working for an increasing pressure & exhaust by utilizing up-and-down motion of the piston ring that is made of a specific synthetic resin. It is small, lightweight, suitable for the built-in usage.

Application:

• Vacuum Chuck
• Vacuum Tweezers
• Film Absorption
• Automatic Machines
• Printing Machines
• Medical Units

• Being of the oilless rotary type, this series pump features low vibration and low pressure pulsation.

Application:

• Vacuum chack
• Packaging machines
• Automated machines
• Optical instrument
• Paper counters

Features:

• DSM Series is no lubrication oil type sliding vane vacuum pump, using DC motor. It is no vibration, no pulsation, suitable as a built-in usage for portable analyzing appliances.

Application:

• Apparatus relating to environments
• Nuisances measuring apparatus
• Gas searsher
• Micro Robot
• OA appliances

• Small size and light weight
• Corrosion resistant
• Quiet and smooth rotation
• High efficiency and energy saving
• Clean vacuum

Application:

• Vacuum drying
• Vacuum degassing
• Vacuum defoaming
• Helium leak tester
• CO2 gas laser
• Vacuum heat treatment

Features:

• By employing a resinous gear, lubrication oil is not used and there is no necessity for an oil to exchange, nothing to worry about an oil leakage.
• Free to fix the pump longitudinally and / or horizontally.
• By employing a magnet coupling, there is no leakage from the outside.
• Easy rotation by 90 Watt motor.

Application:

• Analyzing appliances
• Etching Units
• CVD systems
• Vacuum Drying
• Apparatus for environmental tests
• He leak tests
• CO2 Gas Laser
• Vacuum degassing
• Exhaust for vacuum furnaces